Last edited by Mizragore
Monday, May 11, 2020 | History

3 edition of User"s manual for the program MONSEL-1 found in the catalog.

User"s manual for the program MONSEL-1

User"s manual for the program MONSEL-1

Monte Carlo simulation of SEM signals for linewidth metrology

  • 15 Want to read
  • 26 Currently reading

Published by U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, For sale by the Supt. of Docs., U.S. G.P.O. in Gaithersburg, MD, Washington, DC .
Written in

    Subjects:
  • Scanning electron microscopy -- Computer programs -- Handbooks, manuals, etc.,
  • Electrons -- Scattering -- Mathematical models -- Computer programs -- Handbooks, manuals, etc.,
  • Monte Carlo method -- Computer programs -- Handbooks, manuals, etc.

  • Edition Notes

    StatementJeremiah R. Lowney and Egon Marx.
    SeriesSemiconductor measurement technology, NIST special publication -- 400-95.
    ContributionsMarx, Egon., National Institute of Standards and Technology (U.S.)
    The Physical Object
    FormatMicroform
    Paginationiv, 39 p.
    Number of Pages39
    ID Numbers
    Open LibraryOL17682505M

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User"s manual for the program MONSEL-1 Download PDF EPUB FB2

Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology Published September 1, Cited by: 5.

Get this from a library. User's manual for the program MONSEL Monte Carlo simulation of SEM signals for linewidth metrology. [J R Lowney; Egon Marx; National Institute of Standards and Technology (U.S.)].

Abstract This user's manual is a guide to the FORTRAN code MONSEL-I which is a Monte Carlo simulation of the transmitted and backscattered electron signals in a scanning electron microscope (SEM) associated with a line specimen with a trapezoidal cross : J R.

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